tag:blogger.com,1999:blog-300991962024-02-21T04:42:53.251+02:00PhotolithographyViolettahttp://www.blogger.com/profile/02949445859293776813noreply@blogger.comBlogger2125tag:blogger.com,1999:blog-30099196.post-26962548191527585762006-10-31T10:41:00.000+02:002006-11-08T16:30:18.309+02:00Photolithography process<p>Before spin resist it is necessary:<br />· Clean GaAs wafer piece in NPM hot, ID water, 2-Propanol, ID water.<br />· Dehydration bake @ 110° C for 5 minutes<br /><br /><strong>Positive Photoresist</strong><br /></p><br /><div class="Section1"><br /></div><br /><p class="Section1" align="left"></p><br /><p class="Section1" align="left"><strong>Negative reversal process for resist AZ 5214E</strong></p><br /><p class="Section1">Spin-coat resist 5000rpm for 60s<br />Soft bake at 110° C for 60s<br />Expose at 10mW/cm2 with UV light for 1.8s (maskaligner MA6 or MJB3)<br />Bake at 110° C for 60s<br />Flood expose without mask for 4s<br />Develop in MF319 developer for 25s and rinse with ID water<br /><br /><span style="font-size:130%;">Negative Photoresist<br /></span><br /></p><br /><div class="Section1"><a href="http://photos1.blogger.com/blogger2/1788/3674/1600/table.0.gif"><img style="FLOAT: left; MARGIN: 0px 10px 10px 0px; WIDTH: 370px; CURSOR: hand; HEIGHT: 103px" height="107" alt="" src="http://photos1.blogger.com/blogger2/1788/3674/320/table.0.gif" width="384" border="0" /></a><br /><table style="BORDER-RIGHT: 3pt outset; BORDER-TOP: 3pt outset; MARGIN-LEFT: -39.6pt; BORDER-LEFT: 3pt outset; WIDTH: 522pt; BORDER-BOTTOM: 3pt outset; mso-cellspacing: 2.0pt; mso-padding-alt: 0cm 5.4pt 0cm 5.4pt" cellspacing="3" cellpadding="0" width="696" border="1"><br /><br /><br /><tbody><br /><br /><tr><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 76.85pt; PADDING-TOP: 0cm" valign="top" width="102"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">Photoresist</span><?xml:namespace prefix = o /><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 84.75pt; PADDING-TOP: 0cm" valign="top" width="113"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">Spin Speed/Time</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 74.15pt; PADDING-TOP: 0cm" valign="top" width="99"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">Soft bake Temp/Time</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 78.8pt; PADDING-TOP: 0cm" valign="top" width="105"><br /><br /><br /><p class="MsoNormal" style="TEXT-INDENT: 13.2pt; TEXT-ALIGN: center" align="center"><span style="font-family:Arial;">Exposure Time (assuming 10mW/cm<sup>2</sup>)</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 60.3pt; PADDING-TOP: 0cm" valign="top" width="80"><br /><br /><br /><h1><span style="FONT-WEIGHT: normal;color:windowtext;" >Develop Time<o:p></o:p></span></h1><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">(Developer MF 319)</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 77.65pt; PADDING-TOP: 0cm" valign="top" width="104"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">Post-Exposure Bake<br />Temp/Time</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 69.5pt; PADDING-TOP: 0cm" valign="top" width="93"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">Thickness</span><o:p></o:p></p><br /></td><br /></tr><br /><br /><br /><tr style="HEIGHT: 18.3pt"><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 76.85pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="102"><br /><br /><br /><p class="MsoNormal">AZ 5214E<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 84.75pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="113"><br /><br /><br /><p class="MsoNormal">5000rpm/60s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 74.15pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="99"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">110° C/60s</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 78.8pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="105"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">3s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 60.3pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="80"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">20s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 77.65pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="104"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">115° C/60s<o:p></o:p></span></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 69.5pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="93"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">1.3um<o:p></o:p></p><br /></td><br /></tr><br /><br /><br /><tr style="HEIGHT: 18.75pt"><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 76.85pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="102"><br /><br /><br /><p class="MsoNormal">AZ 1818<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 84.75pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="113"><br /><br /><br /><p class="MsoNormal">5000rpm/60s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 74.15pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="99"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">110° C/60s</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 78.8pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="105"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">4s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 60.3pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="80"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">22s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 77.65pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="104"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">115° C/60s<o:p></o:p></span></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 69.5pt; PADDING-TOP: 0cm; HEIGHT: 18.75pt" valign="top" width="93"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">1.6um<o:p></o:p></p><br /></td><br /></tr><br /><br /><br /><tr style="HEIGHT: 18.5pt"><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 76.85pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="102"><br /><br /><br /><p class="MsoNormal">AZ 4533<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 84.75pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="113"><br /><br /><br /><p class="MsoNormal">5000rpm/60s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 74.15pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="99"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">110° C/60s</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 78.8pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="105"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">10s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 60.3pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="80"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">35-40s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 77.65pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="104"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">115° C/60s<o:p></o:p></span></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 69.5pt; PADDING-TOP: 0cm; HEIGHT: 18.5pt" valign="top" width="93"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">3.5um<o:p></o:p></p><br /></td><br /></tr><br /><br /><br /><tr style="HEIGHT: 18.3pt"><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 76.85pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="102"><br /><br /><br /><p class="MsoNormal">AZ 4562<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 84.75pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="113"><br /><br /><br /><p class="MsoNormal">5000rpm/60s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 74.15pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="99"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">110° C/60s</span><o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 78.8pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="105"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">15-20s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 60.3pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="80"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">50-60s<o:p></o:p></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 77.65pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="104"><br /><br /><br /><p class="MsoNormal"><span style="font-family:Arial;">115° C/60s<o:p></o:p></span></p><br /></td><br /><br /><br /><td style="PADDING-RIGHT: 5.4pt; PADDING-LEFT: 5.4pt; PADDING-BOTTOM: 0cm; WIDTH: 69.5pt; PADDING-TOP: 0cm; HEIGHT: 18.3pt" valign="top" width="93"><br /><br /><br /><p class="MsoNormal" style="TEXT-ALIGN: center" align="center">5um<o:p></o:p></p><br /></td><br /></tr><br /></tbody></table></div>Violettahttp://www.blogger.com/profile/02949445859293776813noreply@blogger.com0tag:blogger.com,1999:blog-30099196.post-1150982990080372992006-06-22T16:28:00.000+03:002006-10-27T19:37:24.546+02:00Photolitography process with positive resists.A typical positive resist (such AZ 4533 and AZ 4562) is composed of three major components: a photoactive compound (inhibitor), a base resin, and a suitable organic solvent systems. All or most of the solvent is lost afterspin and bake. The base resin alone is moderately soluble in the aqueous alkaline developer. Resist is appied to the wafer by spinning. The thickness of the resist film is a function of the spin speed. Final thickness is also affected by subsequent heating steps.<br />Resist films are usually chosen to be between 0.3 and 2.5 µm thick, depending on the application.<br /><strong><br /><br />Lithography consists of six basic steps:</strong><br /><ul><li><em>Wafer Preparation</em><br /></li><li><em>Photoresist coating</em><br /></li><li><em>Softbake</em><br /></li><li><em>Exposure</em><br /></li><li><em>Development</em><br /></li><li><em>Post-Exposure Bake</em><br /></li></ul>Violettahttp://www.blogger.com/profile/02949445859293776813noreply@blogger.com0